Enhanced metal assisted etching method for high aspect ratio microstructures: Applications in silicon micropillar array solar cells

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dc.authoridBaytemir, Gülsen/0000-0002-1143-0730en_US
dc.authoridCiftpinar, Emine Hande/0000-0001-7178-5405en_US
dc.contributor.authorBaytemir, Gülşen
dc.contributor.authorCiftpinar, E. Hande
dc.contributor.authorTuran, Rasit
dc.date.accessioned2024-07-12T21:37:21Z
dc.date.available2024-07-12T21:37:21Z
dc.date.issued2019en_US
dc.department[Belirlenecek]en_US
dc.description.abstractA solar cell device, fabricated on high density array cylindrical pillars, enables photogenerated carrier collection in the radial direction, thus shortening the path length of the carriers reaching the junction. It also provides advantages over conventional planar junction solar cells, such as reduced surface reflectance and enhanced light trapping. In this study, highly ordered Si micropillars were fabricated by photolithography and metal assisted etching (MAE) methods. It is shown that the use of ethanol as a solvent during the etching process and increasing HF concentration in the MAE solution both improve the quality of the surfaces of the pillars. Micropillars with smooth sidewalls and a high aspect ratio were obtained in this way. Solar cells with a radial junction were then fabricated on these micropillars. Standard doping, SiO2/SiNx passivation, and metallisation steps were carried out for the fabrication of solar cells with different micropillar lengths. A significant decrease in reflectance values was observed as the micropillar length increased, as expected. Solar cell short circuit current density (J(SC)) and efficiency (eta) of the solar cells tended to increase with micropillar length up to 11.5 mu m and then decrease due to increased surface recombination. The maximum efficiency achieved in this study is 17.26%.en_US
dc.description.sponsorshipTurkish Scientific and Technological Research Council [1003, 113M941]en_US
dc.description.sponsorshipThis study is supported by the Turkish Scientific and Technological Research Council, under 1003 - Primary Subjects R&D Funding Program Grant, project number 113M941.en_US
dc.identifier.doi10.1016/j.solener.2019.10.033
dc.identifier.endpage155en_US
dc.identifier.issn0038-092X
dc.identifier.scopus2-s2.0-85074203213en_US
dc.identifier.scopusqualityQ1en_US
dc.identifier.startpage148en_US
dc.identifier.urihttps://doi.org/10.1016/j.solener.2019.10.033
dc.identifier.urihttps://hdl.handle.net/20.500.12415/6763
dc.identifier.volume194en_US
dc.identifier.wosWOS:000502888500018en_US
dc.identifier.wosqualityQ2en_US
dc.indekslendigikaynakWeb of Science
dc.indekslendigikaynakScopus
dc.language.isoenen_US
dc.publisherPergamon-Elsevier Science Ltden_US
dc.relation.ispartofSolar Energyen_US
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanıen_US
dc.rightsinfo:eu-repo/semantics/closedAccessen_US
dc.snmzKY04105
dc.subjectRadial Junctionen_US
dc.subjectSolar Cellen_US
dc.subjectMicropillaren_US
dc.subjectHigh Aspect Ratioen_US
dc.subjectMetal Assisted Etchingen_US
dc.subjectEthanolen_US
dc.titleEnhanced metal assisted etching method for high aspect ratio microstructures: Applications in silicon micropillar array solar cellsen_US
dc.typeArticle
dspace.entity.typePublication

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